WebMar 25, 2024 · The Raith eLiNE electron beam writer can be used for writing features with critical dimension of about 20 nm over wafers up to 100 mm in diameter. Thickness of the sample for writing has to be less than 3 mm. The accelerating voltage can be set up to 30 kV, and the beam current can be set by changing apertures between 10 pA and a few nA. WebThe eLINE Plus from Raith is considered to be the optimum, widely distributed system for Research Centers and Universities that want to incorporate an Electron Beam Lithography system with an open platform for extra optional nanofabrication processes and methods in a …
Raith eLine Electron Beam Lithography System Materials …
WebMICROMASTER is an entry-level maskless laser writer for laser beam lithography. Its table-top compact design requires minimum cleanroom space, but still delivers high-quality resolution http://research.physics.illinois.edu/bezryadin/labprotocol/e_LiNE%20Software%20Operation%20Manual.pdf flat rate pressure washing jobs
Downloads of safety Data Sheets Raith Group
WebRaith eLine EBL system is an electron beam lithography system that has a ZEISS SEM column equipped with a Thermal Field Emission electron gun. The accelerating voltage … WebAug 5, 2015 · This action will turn on the Raith monitor screens. STEP 2. Start the Raith Software Fill out the paper Logbook. Double Click on the Raith 150 icon on the Right … WebFebruary 26, 2009 RAITH E-LINE OPERATORS MANUAL 1 Purdue University · Birck Nanotechnology Center Prepared by Josh Smith RAITH e-LiNE OPERATING INSTRUCTIONS 1) LOADING A SAMPLE a. Start the system i. On the Column PC (Right side monitor [R]), select the SmartSEM icon to on the desktop to begin the column … check senior railcard